Aerotech ALS135 Linear Motor Stage
ALS135 直線電機(jī)平臺采用了驅(qū)動，無齒槽直線電機(jī)和長壽命的非接觸線性編碼器。運動磁軌設(shè)計消除了運動電纜管理的需要。
行程：200 mm
定位精度：±0.3 μm
負(fù)載：12 kg
● 超精密運動所需的直接驅(qū)動直線電機(jī)
● 高精度非接觸式線性編碼器
● 小尺寸機(jī)構(gòu)展現(xiàn)出色性能
直線電機(jī)驅(qū)動
Unlike many stages that utilize a side-drive lead screw, the ALS135 employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device there is no backlash, windup or “stiction” that is normally associated with a lead screw or ball screw drive.
The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS135 to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.
出色的分辨率
For alignment applications, outstanding step-to-step resolution is critical. The ALS135 meets this demａnd with a resolution of 2.5 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS135 to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.
優(yōu)秀的幾何特性
Aerotech’s ultra-stiff construction and compact two-piece design results in a stage with unmatched geometric tolerances. As a result, straightness and flatness for the standard stage is <±2 μm over the entire travel. The effects of Abbe error are nearly eliminated, vastly improving overall system accuracy.
平滑行程
Designed for smooth, vibration-free motion, the ALS135 exhibits the outstanding ripple-free motion required for scanning and inspection applications.
長壽命設(shè)計
Like all stages in the Aerotech product family, the ALS135 was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices — they not only exhibit long-life, but are completely maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.
精確校準(zhǔn)
ALS135 series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.
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